Handbook of Ellipsometry (Materials Science and Process Technology)
| Author | : | |
| Rating | : | 4.19 (854 Votes) |
| Asin | : | 0815514999 |
| Format Type | : | paperback |
| Number of Pages | : | 886 Pages |
| Publish Date | : | 2015-06-02 |
| Language | : | English |
DESCRIPTION:
Everything you want to know about ellipsometry Stefan Zollner This book has everything you ever wanted to know about ellipsometry, and much more. This book is much more detailed than the (thinner) introduction to ellipsometry by Tompkins and McGahan and much easier to read (and more up-to-date) than the text by Azzam and Bashara. If you like this handbook with articles by many of the experts in the field, you should also check out the text by Fujiwara and the monograph by Schubert.
Experts in the field contributed to its twelve chapters, covering various aspects of ellipsometry.. Divided into four parts, this comprehensive handbook covers the theory of ellipsometry, instrumentation, applications, and emerging areas. The Handbook of Ellipsometry is a critical foundation text on an increasingly critical subject. Ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, is becoming popular in a widening array of applications because of increasing miniaturization of integrated circuits and breakthroughs in knowledge of biological macromolecules deriving from DNA and protein surface research. Ellipsometry does not contact or damage samples, and is an ideal measurement technique for determining optical and physical properties of materials at the nano scale. With the acceleration of new instruments and applications now occurring, this book provides an essential foundation for the current science and technology of ellipsometry for scientists and engineers in industry and academia at the forefront of nanotechnology developments in instrumentation, integrated circuits, biotechnology, and pharmaceuticals